초록
This paper describes an automated computer-aided engineering (CAE) system for micromachines whose size range 10 to 10$^3$${\mu}{\textrm}{m}$. An automatic finite element mesh generation technique, which is based on the fuzzy knowledge processing and computational geometry techniques, is incorporated into the system, together with one of commercial finite clement (FE) analysis codes, MARC, and one of commercial solid modelers, Designbase. The system allows a geometry model of concern to be a automatically converted to different FE models, depending on physical phenomena to be analyzed, i.e. electrostatic analysis, stress analysis, modal analysis and so on. The FE analysis models are then exported to the FE analysis code, and then analyses are performed. This system is successfully applied to an electrostatic micro actuator.