대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
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마이크로머시닝 기술을 이용한 전자 광학 렌즈의 제작

Fabrication of Electro-optical Microlens Using Micromachining Technology

  • 이용재 (서울대학교 전기공학부) ;
  • 전국전 (서울대학교 전기공학부)
  • Lee, Yong-Jae (School of Electrical Engineering, Seoul National University) ;
  • Chun, Kuk-Jin (School of Electrical Engineering, Seoul National University)
  • 발행 : 1996.11.16
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초록

This paper presents a technique for fabricating an electro-optical microlens for microcolumn e-beam system. The device, named Self-Aligned Microlens (SAM) was realized by mixing surface and bulk micromachining technology. The microbridges were formed on both sides of silicon wafer symmetrically. The alignment error between the electrodes could be controlled within a few micrometers with also reducing the numbers of anodic bonding.

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