Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1997.07d
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- Pages.1311-1313
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- 1997
Two-Chip Integrated Humidity Sensor using Ployimide
폴리이미드를 이용한 투 칩 집적화 습도 센서
- Min, Nam-Ki (Korea University) ;
- Kim, Soo-Won (Korea University) ;
- Hong, Suk-In (Korea University)
- Published : 1997.07.21
Abstract
We describe the working principle, the design, and the characteristics of two-chip integrated humidity sensor. The sensing element was manufactured using polyimide. The interface circuits were developed based on a charge redistribution between capacitors. The sensor and signal conditioning chips were packaged together in the same package. The sensor showed excellent linearity over a wide range of relative humidity.
Keywords