이온주입법에 의한 폴리이미드 박막의 표면개질에 대한 연구

A Study on the Surface Modification of Polyimide Film by ion Implantation

We investigated microhardness, friction, wear and wettability of polyimide for finding out the influence of ion implantation on surface properties. For increasing doses microhardness increased. A reduction of the friction coefficient was most cases correlated with a reduction of wear. The contact angles of water for $B^+$, $N^+$ implanted polyimide decreased from $76^{\circ}$ to zero, as the fluences increased energy of 50, 200 keV.