Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1997.02a
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- Pages.69-69
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- 1997
Effects of thickness and catalysis on Sn$O_{2-x}$ thin film gas sensor fabricated by ion assisted depposition
- Cho, Jung (Division of Ceramics, Korea Institute of Science and Technology, Cheongryang pp.O. Box 131, ) ;
- Song, Seok-Gyeong (Division of Ceramics, Korea Institute of Science and Technology) ;
- Cho, Jun-Sik (Division of Ceramics, Korea Institute of Science and Technology) ;
- Choi, Dong-Soo (Korea Gas Corpporation R&D Center) ;
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Choi, Won-Kook
(Division of Ceramics, Korea Institute of Science and Technology)
;
- Jung, Hyung-Jin (Division of Ceramics, Korea Institute of Science and Technology) ;
-
Koh, Seok-Keun
(Division of Ceramics, Korea Institute of Science and Technology)
- Published : 1997.02.01
Abstract
Keywords