한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1997년도 제12회 학술발표회 논문개요집
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- Pages.144-145
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- 1997
$Ta_2O_5/SiO_2$ Multilayered Thin Film on Si as a New Reference Material for SIMS Deppth Profiling
- Kim, Kyung-Joong (Korea Research Institute of Standards and Science, Daeduck Science Town pp.O. Box 102, Taejon, 305-699) ;
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Moon, Dae Won
(Korea Research Institute of Standards and Science, Daeduck Science Town pp.O. Box 102, Taejon, 305-699)
- 발행 : 1997.02.01