유기절연막을 이용한 고개구율 TFT-LCD의 공정개발

Development of High Aperature TFT LCD Process by Organic Insulator

  • 발행 : 1997.04.01

초록

We were evaluated from organic insulator of low dielectric constants, This organic insulator material is not only conservate TFT chanel but also used to insulator material to data line and pixel ITO electrod. This organic insulator material is possessed high platness and we can coat by Spin-On-Glass type. And we can make high aperature device because minimized black matrix width from coupling cap to data line and pixel ITO electrod, This evaluation with acryl over coat and PFCB(perflorecyclobutine) and we got good results.

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