A Study on the In-plane Motion Measurement of Microstructure using $Moir{\acute{e}}$ Pattern

$Moir{\acute{e}}$ 무늬를 이용한 미세 구조물의 평면 움직임 측정에 관한 연구

  • You, Bong-An (School of Electrical Engineering, Seoul National University) ;
  • Lee, Byoung-Ho (School of Electrical Engineering, Seoul National University)
  • Published : 1997.11.29

Abstract

An in-plane motion measurement method using $moir{\acute{e}}$ patterns by linear-gratings and cross-gratings, which can be used as micro inertial sensors, micro actuators, and micromachined scanning microscopes is demonstrated. A simple digital image processing method that calculates and analyzes the motion of microstructure from $moir{\acute{e}}$ patterns was developed. And using several grating structures fabricated by surface micromachining, we formed $moir{\acute{e}}$ patterns and analyzed the motion of microstructure.

Keywords