대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
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$Moir{\acute{e}}$ 무늬를 이용한 미세 구조물의 평면 움직임 측정에 관한 연구

A Study on the In-plane Motion Measurement of Microstructure using $Moir{\acute{e}}$ Pattern

  • You, Bong-An (School of Electrical Engineering, Seoul National University) ;
  • Lee, Byoung-Ho (School of Electrical Engineering, Seoul National University)
  • 발행 : 1997.11.29
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초록

An in-plane motion measurement method using $moir{\acute{e}}$ patterns by linear-gratings and cross-gratings, which can be used as micro inertial sensors, micro actuators, and micromachined scanning microscopes is demonstrated. A simple digital image processing method that calculates and analyzes the motion of microstructure from $moir{\acute{e}}$ patterns was developed. And using several grating structures fabricated by surface micromachining, we formed $moir{\acute{e}}$ patterns and analyzed the motion of microstructure.

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