한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1998년도 제16회 학술발표회 논문개요집
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- Pages.90-90
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- 1998
Characteristics of AIN thin film preppared by biased reactive RF mangetron sputtering
- Kim, Shin-Cheul (Department of Physics and Atomic Scale Surface Science Research Center, Yonsei University) ;
- Roh, Yong-Suk (DeppartmentDepartment of Physics and Atomic Scale Surface Science Research Center, Yonsei University of Physics and Atomic Scale Surface Science Research Center, Yonsei University) ;
- Kim, Ui-Sik (Department of Physics and Atomic Scale Surface Science Research Center, Yonsei University) ;
- Jeong, Kwang-Ho (Department of Physics and Atomic Scale Surface Science Research Center, Yonsei University)
- 발행 : 1998.06.01