한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)

한국진공학회 (The Korean Vacuum Society)
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Effect of Post Annealing of Amorpphous SiC Thin Films using by PECVD

  • 홍성의 (재료기술연구실, Electronics and Telecommunications Research Institute) ;
  • 이해권 (재료기술연구실, Electronics and Telecommunications Research Institute) ;
  • 백문철 (재료기술연구실, Electronics and Telecommunications Research Institute)
  • 발행 : 1998.06.01
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