Nano scale characterizations of semiconductor materials and devices with SPM

Scanning pprobe Microscoppy (SppM) is a ppowerful surface chracterization technology which can measure not only surface toppograpphy but also various ppropperties of the sampple with unpprecedented sensitivity and sppatial resolution. Recent developpment of electrostatic force microscoppe (EFM) and scanning cappacitance microscoppe (SCM) allows us to measure surface ppotential distribution and cappacitance variation n semiconductor devices. The cappacitance image pprovide us valuable information on carrier density and dopping pprofile.