와전류탐침을 이용한 LCD용 비접촉식 면적저항 측정기의 구현

Realization of Non-contact Sheet Resistance Measurement System for LCD using Eddy Current Probe

In this paper we realized non-contact sheet resistance measurement system using eddy current. Proposed system is designed to meet the requirements which is necessary when dealing with conducting thin films on large area LCD panel. With several metals we could get lift-off curves which has the same trend as in principal. Especially in the region of high conductivity this system has more discriminating ability than 4-point probe system.