A Study on Preparation of A1$_2$O$_3$ Insulation Thick Film by Electrophoretic Method

전기영동법에 의한 A1$_2$O$_3$ 절연성 후막제조에 관한 연구

In this experiment, A1$_2$O$_3$thick films were prepared by electrophoretic method using A1$_2$O$_3$ fine powder of which compositions were FA-5-500 and FA-5-900. As a result of measurement for A1$_2$O$_3$ thick film characteristics due to applied voltage, deposition time and additives condition, the result of deposited films exhibited superior than others when the applied voltage and deposition time were 65 volts and 2 seconds in case of using modified suspension medium added additives. When taken a heat treatment and sintered A1$_2$O$_3$ deposition film made by electrophoresis with A1$_2$O$_3$ suspension medium at 1$700^{\circ}C$ for 5 minutes in hydrogen environment, it could be fabricated in good uniformity and electric characteristics as the A1$_2$O$_3$ insulating thick films.