Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.41.3-41
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- 1998
EFFECT OF ANNEALING ATMOSPHERE ON THE DELAMINATION OF Pt LAYER IN SiO$_2$ /Pt/PZT/Pt STRUCTURE
- Park, Young-Soo (Samsung Advanced Institute of Technology, Electronic Materials Laboratory) ;
- Chung, Chee-Won (Samsung Advanced Institute of Technology, Electronic Materials Laboratory) ;
- Lee, June-Key (Samsung Advanced Institute of Technology, Electronic Materials Laboratory) ;
- Chung, Il-Sub (Samsung Advanced Institute of Technology, Electronic Materials Laboratory)
- Published : 1998.08.01
Abstract
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