MICROSTRUCTUAL CHARACTERIZATION OF Pt/Ti AND Pt/TiOx ELECTRODES FOR SrBi$_2$Ta$_2$O$_{9}$ (SBT) CAPACITORS

  • Yeom, S.J. (Semiconductor Research Division, HYUNDAI electronics) ;
  • Kweon, S.Y. (Semiconductor Research Division, HYUNDAI electronics) ;
  • Kim, N.K. (Semiconductor Research Division, HYUNDAI electronics) ;
  • Sun, H.J. (Semiconductor Research Division, HYUNDAI electronics) ;
  • Yu, Y.S. (Semiconductor Research Division, HYUNDAI electronics) ;
  • Lee, S.K. (Semiconductor Research Division, HYUNDAI electronics)
  • Published : 1998.08.01