CHARACTERIZATION OF SBT THIN FILMS DEPOSITED AT LOW TEMPERATURES BY PLASMA ENHANCED METALORGANIC CHEMCIAL VAPOR DEPOSITION

  • Shin, Woong-Chul (Department of Materials Engineering Chungnam National University g Daeduk Science Town) ;
  • Seong, Nak-Jin (Department of Materials Engineering Chungnam National University g Daeduk Science Town) ;
  • Yoon, Soon-Gil (Department of Materials Engineering Chungnam National University g Daeduk Science Town)
  • Published : 1998.08.01