Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.52.3-52
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- 1998
Thermal Stabilities of the Inductively Coulpled High Density Plasma CVD Oxide Films
- Kim, Han-Min (Memory Product & Development Division, HYUNDAI Electronics Industries Co., Ltd) ;
- Kim, Su-Chan (Memory Product & Development Division, HYUNDAI Electronics Industries Co., Ltd) ;
- Lee, Seung-Jin (Memory Product & Development Division, HYUNDAI Electronics Industries Co., Ltd) ;
- Lee, Sun-Ho (Memory Product & Development Division, HYUNDAI Electronics Industries Co., Ltd) ;
- Lee, Sang-Hwa (Memory Product & Development Division, HYUNDAI Electronics Industries Co., Ltd) ;
- Lee, Jik-Ho (Memory Product & Development Division, HYUNDAI Electronics Industries Co., Ltd) ;
- Kim, Sun-Oo (Memory Product & Development Division, HYUNDAI Electronics Industries Co., Ltd) ;
- Kim, Sang-Bum (Memory Product & Development Division, HYUNDAI Electronics Industries Co., Ltd) ;
- Lee, Sang-Yong (Memory Product & Development Division, HYUNDAI Electronics Industries Co., Ltd)
- Published : 1998.08.01
Abstract
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