INFLUENCE OF RAPID THERMAL ANNEALING OF CERIUM OXIDE ON THE MORPBOLOGICAL AND ELECTRICAL PROPERTIES OF METAL/FERRO-ELECTRIC/INSULATOR/SEMICONDUCTOR CAPACITOR

Lee, Ho. Nyung (Semiconductor Materials Laboratory, Korea Institute of Science and Technology) ;
Shin, Dong-Suk (Semiconductor Materials Laboratory, Korea Institute of Science and Technology) ;
Kim, Yong-Tae (Semiconductor Materials Laboratory, Korea Institute of Science and Technology) ;
Choh, Sung-Ho (Department of Physics, Korea University, Seoul)