NITROGEN ANNEALING EFFECTS ON THE ELECTRICAL PROPERTIES OF LEAD ZIRCONATE TITANATE (PZT) THIN FILMS

  • Kim, Chang-Jung (Electronic Materials Lab., Materials Sector. Samsung Advanced Institute of Technology) ;
  • Kim, T.Y. (Electronic Materials Lab., Materials Sector. Samsung Advanced Institute of Technology) ;
  • Lee, J.K. (Electronic Materials Lab., Materials Sector. Samsung Advanced Institute of Technology) ;
  • Chung, Il-Sub (Electronic Materials Lab., Materials Sector. Samsung Advanced Institute of Technology)
  • Published : 1998.08.01