Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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THERMAL STABILITY OF $RuO_2$ AND Ru THIN FIMLS IN THE VARIOUS AMBIENTS

  • Ahn, Joon-Hyung (Dept. of Mat. Sci. and Engr., KAIST) ;
  • Park, J.H. (Dept. of Mat. Sci. and Engr., KAIST) ;
  • Choi, G.P. (Dept. of Mat. Sci. and Engr., KAIST) ;
  • Choi, W.Y. (Dept. of Mat. Sci. and Engr., KAIST) ;
  • Kim, H.G. (Dept. of Mat. Sci. and Engr., KAIST) ;
  • Lee, W.J. (Semi. Tech. Div., ETRI) ;
  • Yoon, S.G. (Dept. of Mat. Engr., Chungnam National Univ.)
  • Published : 1998.08.01
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