Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.132.2-132
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- 1998
PZT THIN FILM CAPACITORS GROWN BY RF MAGNETRON SPUTTERING
- Jung, S. M. (School of EEC, SKKU) ;
- Choi, Y. S. (School of EEC, SKKU) ;
- Park, Y. (School of EEC, SKKU) ;
- Yi, J. (School of EEC, SKKU) ;
- Song, J. T. (School of EEC, SKKU)
- Published : 1998.08.01
Abstract
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