DEPOSITION OF HIGHLY (111)-ORIENTED $Pb(Zr_2Ti_{1-x})O_3$ THIN FILMS THROUGH THE CONTROL OF Zr FRACT10N BY METAL ORGANIC CHEMICAL VAPOR DEPOSITI0N

  • Bu, K.H. (Electronic Materials Lab, Institute fur Advanced Engineering) ;
  • Park, Y.J. (Electronic Materials Lab, Institute fur Advanced Engineering) ;
  • Choi, D.K. (Electronic Materials Lab, Institute fur Advanced Engineering) ;
  • Seong, W.K. (Electronic Materials Lab, Institute fur Advanced Engineering) ;
  • Kim, J.D. (Electronic Materials Lab, Institute fur Advanced Engineering)
  • Published : 1998.08.01