Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
- /
- Pages.104.1-104
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- 1998
THE EFFECT OF INSERTION OF THIN REFRACTORY METAL ON THE PERFORMANCE OF Ta BARRIER FILMS IN Cu METALLIZATION
- Kwak, Joon-Seop (Dept. of Metallurgical Eng. Yonsei University) ;
-
Baik, Hong-Koo
(Dept. of Metallurgical Eng. Yonsei University)
;
- Kim, Jong-Hoon (Dept. of Materials Eng. Kangwon National University) ;
-
Lee, Sung-Man
(Dept. of Materials Eng. Kangwon National University)
- Published : 1998.08.01
Abstract
Keywords