Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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ELECTROMIGRATION STUDY OF Al THIN FILMS DEPOSITED ON LOW DIELECTRIC POLYIMIDE AND $SiO_2$ ILD

  • Eun, B.S. (Dept. of Mat. Eng., Hanyang Univ.) ;
  • Kim, Y.H. (Dept. of Mat. Eng., Hanyang Univ.)
  • Published : 1998.08.01
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