Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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INDUCTIVELY COUPLED PLASMA (ICP) OXIDATION FOR LOW-TEMPERATURE POLY-Si THIN FILM TRANSISTORS

  • Park, Yong-Woo (Dept. of Materials Science and Engineering, KAIST, Taejon) ;
  • Ahn, Byung-Tae (Dept. of Materials Science and Engineering, KAIST, Taejon)
  • Published : 1998.08.01
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