Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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CHARACTERISTICS OF THERMAL NITRIDE GROWN BY IR FURNACE

  • Shin, H. (Dept. of Electrical Engineering, KAIST) ;
  • Choi, S. (Dept. of Electrical Engineering, KAIST) ;
  • Lee, K. (Dept. of Electrical Engineering, KAIST)
  • Published : 1998.08.01
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