Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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EFFECT OF NEUTRAL GAS FLOW ON THE PLASMA STATE IN ICP PROCESS,

  • Chung, W.Y. (Dept. of Chemical Engineering. KAIST) ;
  • Kim, D.H. (Dept. of Chemical Engineering. KAIST)
  • Published : 1998.08.01
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