Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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INTERFICAL REACTION OF METAL THIN FILMS ON ION IMPLANTATED SILICON UNDER HIGH CURRENT DENSITY

  • Lin, H.H. (Department of Materials Science and Engineering, National Tsing Hua University) ;
  • Chen, K.N. (Department of Materials Science and Engineering, National Tsing Hua University) ;
  • Cheng, S.L. (Department of Materials Science and Engineering, National Tsing Hua University) ;
  • Chen, L.J. (Department of Materials Science and Engineering, National Tsing Hua University)
  • Published : 1998.08.01
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Abstract

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