Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.70.3-70
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- 1998
MOCVD Multiwafer Technology for Mass Production Application
- Hwang, D.H. (Dept. ETRI) ;
- Do, L.M. (Dept. ETRI) ;
- Chu, H.Y. (Dept. ETRI) ;
- Zyung, T. (Dept. ETRI) ;
- Lee, C.J. (KRICT) ;
- Holmes, A.B. (Dept. of Chemistry, University of Cambridge) ;
- Shim, H.K. (Dept. of Chemistry, KAIST) ;
- Protzmann, H. (AIXTRON) ;
- Schmitz, D. (AIXTRON) ;
- Strauch, G. (AIXTRON) ;
- Heuken, M. (AIXTRON) ;
- Juergensen, H. (AIXTRON)
- Published : 1998.08.01
Abstract
Keywords