Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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A STUDY ON THE UNSTABILITY OF CONTACT RESISTANCE IN W(tungsten) POLYCIDE BIT LINE TO W POLYCIDE WORD LINE CONTACT

  • Park, S.W. (Hyundai Electronics Industries Co., Ltd.) ;
  • Son, H.M. (Hyundai Electronics Industries Co., Ltd.) ;
  • Lee, U.Y. (Hyundai Electronics Industries Co., Ltd.) ;
  • Lee, J.S. (Hyundai Electronics Industries Co., Ltd.) ;
  • Yang, H.S. (Hyundai Electronics Industries Co., Ltd.)
  • Published : 1998.08.01
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