Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.112.3-112
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- 1998
THE EFFECT OF $CH_4:N_2$ GAS PRESSURE ON a-C:H(N) FILM GROWN BY DC SADDLE FIELD PECVD
- Whangbo, S.W. (Atomic-scale Surface Science research Center and Dept. of Physics, Yonsei Univ.) ;
- Jang, H.K. (Atomic-scale Surface Science research Center and Dept. of Physics, Yonsei Univ.) ;
- Kim, G. (Atomic-scale Surface Science research Center and Dept. of Physics, Yonsei Univ.) ;
- Whang, C.N. (Atomic-scale Surface Science research Center and Dept. of Physics, Yonsei Univ.) ;
- Yoo, Y.Z. (Dept. of material science and engineering, Kwangju Institute of Science & Technology) ;
- Kim, H.G. (Dept. of material science and engineering, Kwangju Institute of Science & Technology)
- Published : 1998.08.01
Abstract
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