Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.117.2-117
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- 1998
STUDY ON SENSING CHARACTERISTICS OF $WO_3$ THIN FILMS DEPOSITED BY R.F. SPUTTERING FOR $NO_{X\x}$ GAS
- Yoon, Young-Soo (Thin Film Technology Research Center, KIST) ;
- Kim, Tae-Song (Thin Film Technology Research Center, KIST) ;
- Jung, Jong-Hak (Thin Film Technology Research Center, KIST) ;
- Yoo, Kwang-Soo (Thin Film Technology Research Center, KIST) ;
- Jung, Hyung-Jin (Thin Film Technology Research Center, KIST)
- Published : 1998.08.01
Abstract
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