Structural Analysis of porous Si with Medium Energy Ion Scattering Spectroscopy

• D.W. Moon (Surface Analysis Group, Korea Research Institute of Standards and Science) ;
• Kim, H.K. (Surface Analysis Group, Korea Research Institute of Standards and Science) ;
• G.Kuri (Surface Analysis Group, Korea Research Institute of Standards and Science) ;
• Y.H. Ha (Department of Chemistry, KAIST) ;
• Kim, S.H. (Department of Chemistry, KAIST) ;
• J.H. Shim (Department of Electronic Engineering, Kyungpook National University) ;
• Lee, J.H. (Department of Electronic Engineering, Kyungpook National University)

• Published : 1998.08.01

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