Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

1998.08a
/
Pages.96.1-96
/
1998

Materials Research Society of Korea (한국재료학회)

권호 표지

ATOMIC LAYER DEPOSITION OF CALCIUM SULFIDE THIN FILMS IN TRAVELING WAVE REACTOR

Yun, Sun-Jin (Semiconductor Technology Division, Electronics and Telecommunications Research Institute) ;
Kim, Y.S. (Semiconductor Technology Division, Electronics and Telecommunications Research Institute) ;
Nam, K.S. (Semiconductor Technology Division, Electronics and Telecommunications Research Institute)

Published : 1998.08.01

PDF

⟨ Previous Next ⟩

Abstract

Keywords