MACROMACHINING AN AFM CANTILEVER PROBE TIP USING THE FOCUSED ION BEAM

  • Kim, J.J. (Analysis Dept., Memory Product & Technology Development Division. Hyundai Electronics Industries Co, Ltd.) ;
  • Kim, W. (Analysis Dept., Memory Product & Technology Development Division. Hyundai Electronics Industries Co, Ltd.) ;
  • Lee, T.K. (Analysis Dept., Memory Product & Technology Development Division. Hyundai Electronics Industries Co, Ltd.) ;
  • Hong, Y.A. (Analysis Dept., Memory Product & Technology Development Division. Hyundai Electronics Industries Co, Ltd.) ;
  • Kim, H.J. (Analysis Dept., Memory Product & Technology Development Division. Hyundai Electronics Industries Co, Ltd.) ;
  • Lee, S.Y. (Analysis Dept., Memory Product & Technology Development Division. Hyundai Electronics Industries Co, Ltd.)
  • Published : 1998.08.01