Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.144.4-144
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- 1998
MACROMACHINING AN AFM CANTILEVER PROBE TIP USING THE FOCUSED ION BEAM
- Kim, J.J. (Analysis Dept., Memory Product & Technology Development Division. Hyundai Electronics Industries Co, Ltd.) ;
- Kim, W. (Analysis Dept., Memory Product & Technology Development Division. Hyundai Electronics Industries Co, Ltd.) ;
- Lee, T.K. (Analysis Dept., Memory Product & Technology Development Division. Hyundai Electronics Industries Co, Ltd.) ;
- Hong, Y.A. (Analysis Dept., Memory Product & Technology Development Division. Hyundai Electronics Industries Co, Ltd.) ;
- Kim, H.J. (Analysis Dept., Memory Product & Technology Development Division. Hyundai Electronics Industries Co, Ltd.) ;
- Lee, S.Y. (Analysis Dept., Memory Product & Technology Development Division. Hyundai Electronics Industries Co, Ltd.)
- Published : 1998.08.01
Abstract
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