Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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GROWTH AND CHARACTERIZATION OF RF MAGNETRON SPUTTERED $AIn/Sio_2/Si(100)$ THIN FILMS

  • Kim, Hyung-T. (Dept. of Matl's Sci. & Eng., Univ. of Inchon) ;
  • Whang, J.H. (Dept. of Physics. Univ. of Inchon) ;
  • Chung, W.H. (Dept. of Physics. Univ. of Inchon) ;
  • Choi, S.Y. (Dept. of Physics. Univ. of Inchon) ;
  • Park, I.H. (Dept. of Physics. Univ. of Inchon) ;
  • Kwon, M.H. (Dept. of Physics. Univ. of Inchon)
  • Published : 1998.08.01
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