Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
- /
- Pages.153.2-153
- /
- 1998
MOCVD TiN FOR HIGH TEMPERATURE PROCESS
- Lee, Sang-Hyeob (Semiconductor Research Division, HYUNDAI Electronics Ind. Co..) ;
- Kim, Jeong-Tae (Semiconductor Research Division, HYUNDAI Electronics Ind. Co..) ;
- Seo, Hwan-Seok (Semiconductor Research Division, HYUNDAI Electronics Ind. Co..) ;
- Chae, Moo-Sung (Semiconductor Research Division, HYUNDAI Electronics Ind. Co..) ;
- Kim, Sam-Dong (Semiconductor Research Division, HYUNDAI Electronics Ind. Co..)
- Published : 1998.08.01
Abstract
Keywords