대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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- Pages.1001-1003
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- 1998
$Ar^+$ ion laser를 이용한 단결정/다결정 Si 식각 특성 분석
Analysis of single/poly crystalline Si etching characteristics using $Ar^+$ ion laser
- Lee, Hyun-Ki (Department of Electricai Engineering, Korea University) ;
- Park, Jung-Ho (Department of Electricai Engineering, Korea University) ;
- Lee, Cheon (Department of Electrical Engineering, Inha University)
- 발행 : 1998.11.28
초록
In this paper,
키워드