Buried ring이 있는 FLR(Field Limiting Ring) 구조의 항복특성

Breakdown Characteristics of FLR(Field Limiting Ring) with Buried Ring

  • 윤상복 (아주대학교 전자공학부) ;
  • 최연익 (아주대학교 전자공학부)
  • Yun, Sang-Bok (School of Electronics Engineering, Ajou University) ;
  • Choi, Yearn-Ik (School of Electronics Engineering, Ajou University)
  • 발행 : 1999.07.19

초록

The FLR(Field Limiting Ring) structure with a buried ring is proposed to improve breakdown voltage. The breakdown characteristics of proposed structure is verified by two-dimensional device simulator. ATLAS. It has shown that the breakdown voltage of the proposed structure is increased by 11 % compared with that of the FLR.

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