Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1999.02a
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- Pages.57-57
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- 1999
The cross-over of the growth orientation in A1N(0002)/Si(001) films during off-axis RF spputter growth.
- H. W. Jang (Deppartment of Materials science and Engineering, and Center for Electronic Materials Research, Kwangju Institute of Science and Technology, Kwangju) ;
- M. S. Yi (Deppartment of Materials science and Engineering, and Center for Electronic Materials Research, Kwangju Institute of Science and Technology, Kwangju) ;
- D. Y. Noh (Deppartment of Materials science and Engineering, and Center for Electronic Materials Research, Kwangju Institute of Science and Technology, Kwangju)
- Published : 1999.02.01
Abstract
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