Boron and Nitrogen Dopping Effects on the Morpphology and Electrical ppropperties of CVD Diamond

  • Lee, Bum-Joo (Deppartment of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
  • Ahn, Byung-Tae (Deppartment of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) ;
  • Baik, Young-Joon (Thin Film Technology Research Center, Korea Institute of Science and Technology)
  • 발행 : 1999.02.01