Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1999.02a
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- Pages.107-107
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- 1999
Characteristics of Al-Nd and Al-Zr thin film for TFT-LCD by DC magnetron spputtering system
- Kim, Dong-Sik (Deppartment of Electronic Engineering Kyunghee University) ;
- Chung, Kwan-Soo (Deppartment of Electronic Engineering Kyunghee University)
- Published : 1999.02.01
Abstract
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