Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1999.02a
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- Pages.122-122
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- 1999
Acceleration energy deppendence of eppitaxial Y2O3 film grown by ionized cluster beam depposition
- M. H. Cho (Atomic-scale Surface Science Research Center & Deppartment of Physics, Yonsei University) ;
- Park, Y. G. (Atomic-scale Surface Science Research Center & Deppartment of Physics, Yonsei University) ;
- S. W. Whangbo (Atomic-scale Surface Science Research Center & Deppartment of Physics, Yonsei University) ;
- Kim, S. K. (Atomic-scale Surface Science Research Center & Deppartment of Physics, Yonsei University) ;
- C. N. Whang (Atomic-scale Surface Science Research Center & Deppartment of Physics, Yonsei University) ;
- D. H. Ko (Deppartment of Ceramic Engineering, Yonsei University) ;
- Park, S. C. (Thin Film Science & Technology Center, Korea Institute of Science and Technology) ;
- S. J. Cho (Deppartment of Physics, Kyungseong University)
- Published : 1999.02.01
Abstract
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