Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A Study on the Humidity Sensing Properties of Polyimide thin films prepared

진공증착중합법에 의해 제초된 폴리이미드 박막의 습도감지 특성에 관한 연구

  • 황선양 (인하대학교 전기공학과) ;
  • 김형권 (인하대학교 전기공학과) ;
  • 이붕주 (인하대학교 전기공학과) ;
  • 박구범 (유한대학교 정보통신과) ;
  • 김영봉 (인하공업전문대학 전기과) ;
  • 이은학 (한라대학교 전기공학과) ;
  • 이덕출 (한라대학교 전기공학과)
  • Published : 1999.11.01
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Abstract

The Study of this paper is to establish the optimum fabricating condition of specimens using Vapor Deposition Polymerization Method which belongs to a mode of preparation of functional organic thin films with dry process and to develop thin film type humidity sensor which has good humidity sensitive Characteristics. Scanning electron microscopy Atomic force microscopy were used to analyze the characteristics of thin film and the basic structure of the humidity sensor is a parallel capacitor which consists of three layers of Al/PI/Al. The characteristics of fabricated samples were measured under various conditions and obtained linear characteristics in the range of 20∼80%RH independent of temperature change and low hysteresis characteristics.

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