대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

와전류(eddy-current)방법에 의한 비접촉 전기비저항 측정기술 개발

The measurement for contactless eddy-current conductivity on Si wafer

  • 박진습 (한국표준과학연구원 전자기 그룹) ;
  • 유권상 (한국표준과학연구원 전자기 그룹) ;
  • 류제천 (한국표준과학연구원 전자기 그룹) ;
  • 유광민 (한국표준과학연구원 전자기 그룹)
  • Park, Jin-Sueb (Electromagnetic Division. Korea Research Institute of Standards and Science) ;
  • Ryu, Kwon-Sang (Electromagnetic Division. Korea Research Institute of Standards and Science) ;
  • Ryu, Je-Cheon (Electromagnetic Division. Korea Research Institute of Standards and Science) ;
  • Yu, Kwang-Min (Electromagnetic Division. Korea Research Institute of Standards and Science)
  • 발행 : 1999.11.20
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초록

The method of measurement for contactless eddy-current conductivity using magnetic dipole field theory was suggested by M.C Chen[1], which calculate the eddy-current caused by exciting coil with Faraday's induction law. In this work, we have developed the apparatus for contactless measurement of conductivity or resistivity with the dipole field theory. The resistivity can be measured from several to a dozen $m{\Omega}{\cdot}cm$ range within maximum 30% error. At the high resistivity range above $100{\Omega}{\cdot}cm$, the standard deviation of measurement was very large as the induced voltage of sensing coil is small so it was difficult to measure the value precisely.

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