대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
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- Pages.1096-1098
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- 1999
불평형 마그네트론 스파터링에 의한 AC PDP용 MgO 보호층의 최적형성조건에 관한 연구
A Study on the Optimum Preparation Conditions of MgO Protecting Layer in AC PDP by Unbalanced Magnetron Sputtering
- Kim, Young-Kee (Dept. of Electrical Engineering, Pusan National University) ;
- Park, Jung-Tae (Dept. of Electrical Engineering, Pusan National University) ;
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Kim, Gyu-Seup
;
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Cho, Jung-Soo
(Dept. of Electrical Engineering, Pusan National University)
;
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Park, Chung-Hoo
(Dept. of Electrical Engineering, Pusan National University)
- 발행 : 1999.11.20
초록
The performance of as plasma display panels (PDP) is influenced strongly by the surface glow discharge characteristics on the MgO thin films. This paper deals with the optimum preparation conditions of MgO Protecting layer by RF unbalanced magnetron sputtering(UBMS) in surface discharge type AC PDP. The samples prepared with the do bias voltage of -10V showed lower discharge voltage, lower erosion rate as a consequence of ion bombardment, higher optic transparency and higher crack resistance in annealing process than those samples prepared by conventional magnetron sputtering or E-beam eraporation.
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