Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

Catalyst effect on the structure and growth of carbon nanotube by chemical vapor deposition

CVD 에 의한 탄소나노튜브의 구조 및 성장에 대한 촉매금속의 영향

  • Son, Kwon-Hee (School of Electrical Engineering, Kunsan National University) ;
  • Lee, Tae-Jae (School of Electrical Engineering, Kunsan National University) ;
  • Lyu, Seung-Chul (School of Electrical Engineering, Kunsan National University) ;
  • Choi, Sung-Hun (School of Electrical Engineering, Kunsan National University) ;
  • Lee, Cheol-Jin (School of Electrical Engineering, Kunsan National University) ;
  • Yoo, Jae-Eun (Iljin Nanotech Co., Ltd) ;
  • Kim, Seong-Jeen (School of Electrical and Electronic Eng., Kyungnam Univ.)
  • 손권희 (군산대학교 전자정보공학부) ;
  • 이태재 (군산대학교 전자정보공학부) ;
  • 류승철 (군산대학교 전자정보공학부) ;
  • 최성헌 (군산대학교 전자정보공학부) ;
  • 이철진 (군산대학교 전자정보공학부) ;
  • 유재은 (일진 나노텍(주)) ;
  • 김성진 (경남대학교 전기전자공학부)
  • Published : 2000.07.17
Download PDF
⟨ Previous Next ⟩

Abstract

Vertically aligned multiwalled carbon nanotubes are grown on silicon oxide substrate at 950$^{\circ}C$ by thermal chemical vapor deposition using $C_{2}H_2$. Three catalytic metals such as iron(Fe), cobalt (Co), and nickel(Ni) are used as catalyst, we found that the growth rate of carbon nanotubes for three catalyst particles are in an order of Fe > Ni > Co. All carbon nanotubes are revealed to have bamboo structure with no encapsulated catalytic particles, the diameter of carbon nanotubes depend on the catalyst, the tip and the compartment sheets of bamboo structure also depend on the shape of catalytic particles.

Keywords