NiCr 박막저항의 제작 및 특성연구

The fabrication and study of NiCr thin film resister

  • 발행 : 2000.07.17

초록

We were fabricated of NiCr thin film resitors(TFR) on $Al_{2}O_3$ substrates by dc magnetic sputtering, system. The characteristics of electrical resistance by substrates & annealing condition on the resistors were studied by X-ray Diff. and SEM, ESCA.

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