Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Deposition of DLC film by using an FCVA system with a magnetic mirror and characterization of its material properties

거울형 자계 구조를 갖는 진공 여과 아크 증착법을 이용한 다이아몬드상 탄소 박막의 증착 및 물성 분석

  • PARK, Chang-Kyun (Dept. of Electrical Engineering, Hanyang University) ;
  • UHM, Hyun-Seok (Dept. of Electrical Engineering, Hanyang University) ;
  • SEO, Soo-Hyung (Center for Electronic Materials and Components, Hanyang University) ;
  • PARK, Jin-Seok (Dept. of Electrical Engineering, Hanyang University)
  • 박창균 (한양대학교 전기공학과) ;
  • 엄현석 (한양대학교 전기공학과) ;
  • 서수형 (한양대학교 전자재료 및 부품연구센터) ;
  • 박진석 (한양대학교 전기공학과)
  • Published : 2000.07.17
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Abstract

DLC films are deposited by using an FCVA deposition system with a mirror-type magnetic field configuration. Permanent magnets and: magnetic yokes around the cathode have been observed to enhance the mobility of arc spots on the cathode and the stability of arc plasma, Effects of reactor pressures and substrate biases on structural properties of DLC films deposited are investigated. The results show that the highest $sp^{3}/sp^{2}$ fraction is obtained when the films are deposited at a pressure of $3{\times}10^4$ Torr and a bias voltage of - 50 V. The variation of the structural properties due to thermal stress up to 500$^{\circ}C$ is also examined.

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